Advanced Ceramic products for semiconductor and liquid crystal manufacturing machines, and for solar equipment
Manufacturing machines parts of semiconductors need to have features of high rigidity, processing accuracy, seismic capacity, heat resistance, heat conductivity efficiency, surface processing accuracy, metal contamination, chemical resistance, gas resistance, plasma resistance, insulation performance, electric permittivity, dielectric loss tangent, volume resistivity, low dust generation (particles), cost, etc.
Nishimura Advanced Ceramics proposes applying highly-pure Alumina (Al2O3 purity 99.5% to 99.99%), Aluminum Nitride (ALN), and Yttria (Y203), as those ceramics satisfying the above requirements.
NAC’s ceramic manufacturing policy is producing as much as high-density ceramic with tiny crystal composition. This policy match with the requirement from the semiconductor device industry because Nishimura low pore vacancy ceramics is suitable for a plasma generation device.
Non-metal contamination grade Alumina is also widely used for a semiconductor front end device.
Because of its features, those materials are used as a
-Etching nozzles, Shield
and so on.
Aluminum nitride(AlN) is excellent in heat conductivity, heat radiation, heat shock resistance, and electrical insulation. Furthermore, its thermal expansion coefficient is similar to a silicon wafer.
Yttria is the material that has excellent plasma resistance.
All kinds of material/items are possible to order with custom design and small quantity.
|We have choose N-999S(Al2O3 99.9%) which is stand for plasma. This product is used for semiconductor manufacturing device.|
|As fired finish and chamber under 0.2mm：φ10 ＋0／－0.05×φ8 ＋0.1／0×350L
N-999S material (Al2O3 99.9% material)
This hair pin tube(U shape tube) is used as a cover pipe of semiconductor manufacturing device.
Material: N-99(99.7% Alumina)
|Nishimura’s N-9000NS translucent high strength alumina is used as plasma protection of semiconductor manufacturing device.|
|Made by Nishimura high purity Alumina ceramics.|
Alumina 99,7% material.
All the holes and channels are taken by the green-machining method(unfired machining)