Ceramic parts for semiconductor and liquid crystal manufacturing machines, and for solar equipment

Ceramic products for semiconductor and liquid crystal manufacturing machines, and for solar equipment

Manufacturing machines parts of semiconductors need to have features of high rigidity, processing accuracy, seismic capacity, heat resistance, heat conductivity efficiency, surface processing accuracy, metal contamination, chemical resistance, gas resistance, plasma resistance, insulation performance, electric permittivity, dielectric loss tangent, volume resistivity, low dust generation (particles), cost, etc.
Nishimura Advanced Ceramics proposes applying highly-pure Alumina (Al2O3 purity 99.5% to 99.99%), Aluminum Nitride (ALN), and Yttria (Y203), as those ceramics satisfying the above requirements.

Because of its features, those materials are used as a transfer arm, wafer stages, and so on. Those materials are also good compatibility with metallization.

Aluminum nitride is excellent in heat conductivity, heat radiation, heat shock resistance, and electrical insulation. Furthermore, its thermal expansion coefficient is similar to a silicon wafer.
Yttria is the material which has excellent plasma resistance.

Case Introduction

Plasma proof Bell-Jar for CVD Material N-999S

耐プラズマCVD用ベルジャ 材質N-999S

We have choose N-999S(Al2O3 99.9%) which is stand for plasma. This product is used for semiconductor manufacturing device.

Alumina Ceramic N-999S Ceramic tube

アルミナ N-999S チューブ

As fired finish and chamber under 0.2mm:φ10 +0/-0.05×φ8 +0.1/0×350L
N-999S material (Al2O3 99.9% material)


Hair pin tube plasma cover

耐プラズマ用セラミックスU字管

This hair pin tube(U shape tube) is used as a cover pipe of semiconductor manufacturing device.

Material: N-99(99.7% Alumina)

Translucent plasma cover 

透光性アルミナN-9000NS

Nishimura’s N-9000NS translucent high strength alumina is used as plasma protection of semiconductor manufacturing device.

Plasma proof ceramic elbow

121120b1

Made by Nishimura high purity Alumina ceramics.

N-99 Semiconductor produce equipment parts

高純度アルミナN-99製(アルミナ99.5%以上)半導体製造装置用部品
 

For inquiries and further information:

Nishimura Porcelain Co., Ltd.
npc-e3@nishimuratougyou.co.jp 
Please feel free to contact us on any matters concerning industrial ceramics.
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