Porous ceramics vacuum chuck with partial adsorbing property, VM-6
Our partial adsorbing porous vacuum chuck VM-6 is an innovative vacuum chuck with microporous ceramics(1μm pores).
Normally, Ceramics vacuum chuck only adsorbs and pins down an object that covers all surfaces of the vacuum chuck. However, VM-6 can adsorb and pin down many smaller objects at once, like the picture on the right side.
It can be applied for adsorbing small objects with smooth surfaces, such as small plates, films, circuit boards, etc.
We keep developing and utilizing it based on customers`s requests, such as chuck that fix the film warp, prevent ESD, black color, and so on.
We can produce a large-size vacuum chuck(over □2m).
You can either purchase the complete vacuum chuck with a base plate or just the porous plate and simply set it on the normal vacuum chuck.
Please try our partial adsorbing vacuum chuck VM-6 with the free rental test kit!
If you are interested, please contact us anytime.
Adsorbing several objects by using the VM-6 Partial adsorbing porous vacuum chuck
Adsorbing a film by using VM-6 Partial adsorbing porous vacuum chuck
Compared with a usual porous ceramic vacuum chuck.
| Normal ceramic vacuum chuck | Partial adsorbing vacuum chuck VM-6 |
|
●An object smaller than a vacuum chuck can’t be adsorbed ●only one object can be absorbed at once. |
● Adsorb and fix smaller objects than the porous chuck itself. ●Adsorb and pin down several objects at once. |
| ●In the case of applying for thin objects such as film, there is a risk of leaving an adsorption flaw. | ●Beauce of its smooth surface(Ra1.4-2.0), there is no risk of leaving adsorption flaws on thin objects. |
| ●pores can easily be clogged with particles. | ●Because of its tiny pores (1μm), the porous plate would not be clogged with particles. |
Expected applications
- Fixing small objects such as semiconductors, MEMS, and so on.
- Fixing thin objects such as film, semiconductors, and so on.
- Conveying objects by air floating
- Vacuum chuck for machining
Our partial vacuum chuck can solve all the problems that other normal vacuum chuck have. It will be a game-changer for you to increase your productivity.
If you are interested, please contact us anytime. A free rental sample for testing is available.
Vacuum chuck plate for filming / LCD(Liquid Crystal Device) Industry
For a customer who required a vacuum chuck for film, NPC developed a special-grade vacuum chuck.
ESD grade for film chucking and Black color material for the image inspection industry.
Please contact to us for more details.
Alumina base vacuum chuck
We also produce normal ceramic vacuum chucks, which are often applied for adsorbing wafers.
Also, we can produce a vacuum chuck with a complex shape.