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Home > Product > Partial adsorbing porous vacuum chuck VM-6 / Ceramic vacuum chuck

Partial adsorbing porous vacuum chuck VM-6 / Ceramic vacuum chuck

Porous ceramics vacuum chuck with partial adsorbing property, VM-6

Our partial adsorbing vacuum chuck VM-6 is the innovative vacuum chuck with micro porous ceramics(1μm pores).

Normally, Ceramics vacuum chuck only adsorb and fix an object which covers all surface of vacuum chuck, however, VM-6 can adsorb and fix many of smaller objects  at once, like the picture on the right side.

It can be applied for adsorbing small objects with smooth surface, such as small plates, films, circuit boards, and so on, and for applications which requires smooth surface. 

We develop and produce it based on customer requests, such as the chuck reform the film warp, prevent ESD, having black color, and so on.

We can produce a large-size vacuum chuck(over □2m) also.

You can either purchase the complete vacuum chuck with base plate, or just the porous plate and simply set it on normal vacuum chuck. 

Please try our partial adsorbing vacuum chuck VM-6 with the free rental test kit! 

If you are interested, please contact us anytime. 

Adsorbing several objects by using Partial adsorbing vacuum chuck

Adsorbing film by using partial vacuum chuck

 

Compare with Normal ceramic vacuum chuck

 

Normal ceramic vacuum chuck Partial adsorbing vacuum chuck  VM-6

●Object smaller than a vacuum chuck can’t be adsorbed

●More than one object can’t be adsorbed at once.

● Adsorb and fix smaller objects than the porous chuck itself.

●Adsorb and fix several objects at once.

●In the case of applying for thin objects such as film, there is a risk of leaving adsorption trace. ●Beauce of its smoth surface(Ra1.4-2.0), there is no risk of leaving adsorbtion trace on thin objects.
●pores can easily be clogged with particles. ●Because of its tiny pores (1μm), porous plate would not be clogged with particles.

Expected applications

  • Fixing small objects such as semiconductors, MEMS and so on.
  • Fixing thin objects such as film, semiconductors, and  so on.
  • Conveying object by air floating
  • Vacuum chuck for machining

Our partial vacuum chuck can solve many problems which were happening when you were using normal vacuum chuck.It will be game changer to increase your productivity.

If you are interested, please contact us anytime. Free rental sample for testing is available.

Alumina base vacuum chuck

We also produce normal ceramics vacuum chuck which often applied for adsorbing wafer.

We can produce a vacuum chuck with complex shape also.

 

 

 

 

 

 

Polishing alumina plate fixed by ceramic vacuum chuck

Fixing alumina plate by ceramic vacuum chuck

Product

  • Partial adsorbing porous vacuum chuck VM-6 / Ceramic vacuum chuck
  • Ceramic Heat sinks for LED parts
  • Ceramic Square Plate ,Round Bar, Round Plate
  • Ceramic substrate size list (Alumina 96%, Aluminum Nitride 170W)
  • Ceramic parts for medical equipment and analyzers
  • Micro Porous Alumina Ceramics, Nano porous ceramics
  • Ceramic parts for semiconductor and liquid crystal manufacturing machines, and for solar equipment
  • Ceramic machine parts and ceramic pump parts
  • Ceramic For optical products
  • Ceramic parts for temperature sensor parts
  • Ceramic lighting apparatuses
  • Ceramic insulators for heaters, crucibles and heat-resistant parts
  • Ceramic for power supply devices and insulators
  • Arc extinguishing ceramic(Arc resistant ceramic)
  • For catalysts, antibacterial processing and water treatment
  • Metal Injection Molding feedstock binder mixing (MIM)
  • Machinable ceramic
  • Ceramic Circuit Board
  • CIM(High-pressure Ceramic InJection Molding)
  • Apatite Bio Ceramic (Nano Freeze Dried Powder, CIM feedstock)
  • Large Size Advanced Ceramics (N-999, AlN, Zirconia)
  • High purity Alumina ceramic crucible, Aluminum Nitride ceramic crucible
Compare material properties
Ceramic substrate size list
Compare material properties
Properties sheet PDF Downloads
CIM Feedstock
3D Ceramic Printing (Additive manufacturing) Service / Fast Prototyping
Medical ceramics
Facilities, measuring equipments
manufacturing technology of celamics

Contact us

Nishimura Advanced Ceramics Co.,Ltd

+81-80-8305-9205

3-2 Kawata Kiyomizuyaki Danchi-cho,
Yamashina-ku, Kyoto, 607-8322, Japan

npc-e3@nishimuratougyou.co.jp

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西村陶業株式会社

3-2 Kawata Kiyomizuyaki Danchi-cho,
Yamashina-ku, Kyoto, 607-8322, Japan

TEL:+81-80-8305-9205

npc-e3@nishimuratougyou.co.jp

  • Home
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  • Characteristics
  • About
    • Company features
    • Management philosophy, quality policies and message from CEO
    • Company profile, history and access map
    • Patent, Utility model, and trademark
  • Contact us
  • Ceramic Square Plate ,Round Bar, Round Plate
  • Compare material properties
  • Properties sheet PDF Downloads
  • 3D Ceramic Printing (Additive manufacturing) Service / Fast Prototyping
  • Medical ceramics
  • Facilities introduction
    • Measureing devices for evaluation
  • manufacturing technology of celamics
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