We introduce the ANYCHUCK® partial vacuum porous chuck (500 × 300 × 30 mm / 19.69 × 11.81 × 1.18 in), precision-machined to achieve an exceptional surface flatness of within 2 µm(≈ 80µin).
This product can be used as a high-precision vacuum holding stage for demanding applications.
What Is a Porous Vacuum Chuck?
 |
A porous vacuum chuck features a microporous internal structure that distributes vacuum uniformly across the surface. Suction is applied through countless fine pores, allowing the entire workpiece to be held evenly and gently. Thin workpieces |
High-Precision Vacuum Stage with 2 µm Flatness
The chuck’s top surface is finished to a flatness of 2 µm or less.
Flatness refers to the height difference between the highest and lowest points on a surface. In this case, that difference is controlled within 2 microns (µm) / 80 microinches (µin).
For reference, One micrometer (µm) is one thousandth of a millimeter.
Achieving this level of flatness enables stable and reliable workpiece holding in applications such as:
- Precision measurement stages
- Semiconductor and glass substrate inspection stages
- Positioning stages for laser processing and micro-machining
Even very thin workpieces can be held uniformly, minimizing the effects of steps, distortion, and warpage across the entire surface.
High Rigidity and Reliability with 99.7% Alumina Ceramic Base
The base material is made from 99.7% high-purity alumina ceramic.
By using this high-purity grade, the chuck offers both excellent dimensional stability and long-term durability.
This makes the ANYCHUCK suitable for environments that demand high cleanliness and precision, including:
- Semiconductor manufacturing
- Electronic component production
- Optical component processing
|
Reated page |