Aluminum Nitride ceramics 170Wat, 200Wat, High purity version

Nishimura produces Aluminum Nitride ceramics, and there is two type.

 

ALN-170 which is our standard grade. This material has thermal conductivity more than 170 Wat(W/mK)

ALN-200 which has high thermal conductivity, 200W. This material has thermal conductivity more than 200 Wat(W/mK)

ALN-HY0 which has high purity(It doesn’t contain any auxiliaries).  This material has thermal conductivity more than 90 Wat(W/mK)


↑Picture of AlN-200 substrate

Character

  • ALN material has excellent thermal conductivity, heat radiation, and electric insulation. Also, it has significant thermal shock resistance.
  • Thermal expansion goes well with a Silicon wafer.
  • It has Good corrosion resistance to fluorine‐containing gasses.
  • Excellent plasma resistance.

shape

  • Plate, bar, pipe, crucible, complex design, We can produce for any shapes!

Manufacturing

Usefulness

  AlN material Nishimura No.
Properties   AlN-170 AlN-200 AlN-HYO
Thermal conductivity W/mk(R・T) 170 200 90
Thermal emissivity (100℃) 0.93 0.93 0.93
Thermal expansion coefficient 10⁻⁶/℃(RT~400℃) 4.5 4.5 4.5
insulation resistane Ω・cm(RT) >10¹³ >10¹³ >10¹³
Dielectric strength kV/mm(RT) 15 15 15
Dielectric constant (1MHz) 8.8 8.8 8.8
Dielectric loss 10⁻⁴(1MHZ) 5 5 5
Fracture toughness kgf/mm² 35 40 40
Bulk density g/cm³ 3.32 3.32 3.23
Y % 3.5 3.3 0
O % 1.5 1.2 0.58
Metal inpurity ppm <500 <500 <500
Feature Normal use High thermal conductivity Highpurity      (no sintering aid) 
 

For inquiries and further information:

Nishimura Porcelain Co., Ltd.
npc-e3@nishimuratougyou.co.jp 
Please feel free to contact us on any matters concerning industrial ceramics.
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