Aluminum Nitride ceramics 170Wat, 200Wat, High purity version

Nishimura produces Aluminum Nitride ceramics, and there is two types.


ALN-170 which is our standard grade. This material has thermal conductivity of more than 170 Wat(W/mK)

ALN-200 which has high thermal conductivity, 200W. This material has thermal conductivity of more than 200 Wat(W/mK)

ALN-230 The highest thermal conductivity grade(23oW/mK) 

ALN-HY0 which has high purity(It doesn’t contain any auxiliaries).  This material has a thermal conductivity of more than 90 W(W/mK)

↑Picture of AlN-200 substrate


  • ALN material has excellent thermal conductivity, heat radiation, and electric insulation. Also, it has significant thermal shock resistance.
  • Thermal expansion goes well with a Silicon wafer.
  • It has Good corrosion resistance to fluorine-containing gasses.
  • Excellent plasma resistance.


  • Plate, bar, pipe, crucible, complex design, We can produce for any shapes. 
  • Large size ∮600 is available. 








  AlN material Nishimura No.
Properties   AlN-170 AlN-200 AlN-HYO
Thermal conductivity W/mk(R・T) 170 200 90
Thermal emissivity (100℃) 0.93 0.93 0.93
Thermal expansion coefficient 10⁻⁶/℃(RT~400℃) 4.5 4.5 4.5
insulation resistane Ω・cm(RT) >10¹³ >10¹³ >10¹³
Dielectric strength kV/mm(RT) 15 15 15
Dielectric constant (1MHz) 8.8 8.8 8.8
Dielectric loss 10⁻⁴(1MHZ) 5 5 5
Fracture toughness kgf/mm² 35 40 40
Bulk density g/cm³ 3.32 3.32 3.23
Y % 3.5 3.3 0
O % 1.5 1.2 0.58
Metal inpurity ppm <500 <500 <500
Feature Standard
High thermal conductivity High purity      

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Nishimura Porcelain Co., Ltd. 
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