NAC produce a ceramic dummy wafer in a variety of material and spec.
Material choice example: AlN-HYO Aluminum Nitride 99.9% purity grade, or N-99W Alumina 99.7% White color grade.
Size：Upto 12 inches
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ALN 12 inch・8inch dummy wafer |
Alumina 8 inch dummy wafer |
Related page
Ceramic parts for semiconductor and liquid crystal manufacturing machines, and for solar equipment
Aluminum Nitride material page